Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851318 | MEMS device and method for making the same | Yi-Chuan Teng, Ching-Kai Shen, Wei-Cheng Shen, Xin-Hua Huang, Wei-Chu Lin | 2023-12-26 |
| 11807520 | Semiconductor structure and method for manufacturing thereof | Yi-Chuan Teng, Ching-Kai Shen | 2023-11-07 |
| 11772960 | Method of forming dielectric and metal sealing layers on capping structure of a MEMs device | Ching-Kai Shen, Yi-Chuan Teng, Wei-Chu Lin, Hung-Wei Liang | 2023-10-03 |