Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809080 | Extreme ultraviolet photoresist with high-efficiency electron transfer | Chin-Hsiang Lin, Chien-Wei Wang | 2023-11-07 |
| 11796918 | Underlayer material for photoresist | An-Ren Zi, Ching-Yu Chang | 2023-10-24 |
| 11728161 | Spin on carbon composition and method of manufacturing a semiconductor device | Jing Hong Huang, Ching-Yu Chang | 2023-08-15 |
| 11714355 | Photoresist composition and method of forming photoresist pattern | Li-Po YANG, Ching-Yu Chang | 2023-08-01 |
| 11626293 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Ching-Yu Chang, Chin-Hsiang Lin | 2023-04-11 |
| 11594511 | Bonding device and bonding method | Chih-Cheng Hung | 2023-02-28 |
| 11550220 | Negative tone photoresist for EUV lithography | Li-Po YANG, Ching-Yu Chang | 2023-01-10 |