Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809080 | Extreme ultraviolet photoresist with high-efficiency electron transfer | Wei-Han Lai, Chin-Hsiang Lin | 2023-11-07 |
| 11703766 | Materials and methods for forming resist bottom layer | Jing Hong Huang, Shang-Wern Chang, Ching-Yu Chang | 2023-07-18 |