Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850702 | Chemical mechanical planarization membrane | Cheng-Ping Chen, Ren-Dou Lee, Sheng-Tai Peng, Tzi-Yi Shieh, Chien-Wei Chang | 2023-12-26 |
| 11571782 | Single bodied platen housing a detection module for CMP systems | Cheng-Ping Chen, Shih Chung Chen, Sheng-Tai Peng, Rong-Long Hung | 2023-02-07 |