Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850702 | Chemical mechanical planarization membrane | Cheng-Ping Chen, Ren-Dou Lee, Tsung-Lung Lai, Tzi-Yi Shieh, Chien-Wei Chang | 2023-12-26 |
| 11618126 | Polishing pad conditioning apparatus | Cheng-Ping Chen, Shih Chung Chen, Hung-Lin Chen | 2023-04-04 |
| 11571782 | Single bodied platen housing a detection module for CMP systems | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen, Rong-Long Hung | 2023-02-07 |