Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11571782 | Single bodied platen housing a detection module for CMP systems | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen, Sheng-Tai Peng | 2023-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11571782 | Single bodied platen housing a detection module for CMP systems | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen, Sheng-Tai Peng | 2023-02-07 |