Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815821 | Module vessel with scrubber gutters sized to prevent overflow | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Po-Chung Cheng | 2023-11-14 |
| 11796917 | Width adjustment of EUV radiation beam | Chi-Ming Yang, Tsung-Hsun Lee, Jian-Yuan Su, Po-Chung Cheng | 2023-10-24 |
| 11675280 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2023-06-13 |
| 11573495 | Control of dynamic gas lock flow inlets of an intermediate focus cap | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Po-Chung Cheng | 2023-02-07 |