Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776792 | Plasma processing apparatus and plasma processing method | Shunsuke Tashiro, Shengnan Yu, Yasushi Sonoda, Kiyohiko Sato, Masahiro Nagatani | 2023-10-03 |
| 11600472 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Ryoichi Isomura, Yuusaku Sakka, Kouhei Satou, Satoshi Yamamoto, Hiromichi Kawasaki | 2023-03-07 |