Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776792 | Plasma processing apparatus and plasma processing method | Shunsuke Tashiro, Takashi Uemura, Shengnan Yu, Yasushi Sonoda, Kiyohiko Sato | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776792 | Plasma processing apparatus and plasma processing method | Shunsuke Tashiro, Takashi Uemura, Shengnan Yu, Yasushi Sonoda, Kiyohiko Sato | 2023-10-03 |