SY

Shengnan Yu

HH Hitachi High-Technologies: 1 patents #104 of 389Top 30%
Overall (2023): #252,185 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11776792 Plasma processing apparatus and plasma processing method Shunsuke Tashiro, Takashi Uemura, Yasushi Sonoda, Kiyohiko Sato, Masahiro Nagatani 2023-10-03