Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1008986 | Ion shield plate for plasma processing apparatus | Yusuke Nakatani, Kazuumi Tanaka, Masahiro Yamaoka, Taku Iwase | 2023-12-26 |
| 11776792 | Plasma processing apparatus and plasma processing method | Shunsuke Tashiro, Takashi Uemura, Shengnan Yu, Kiyohiko Sato, Masahiro Nagatani | 2023-10-03 |