Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600472 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Ryoichi Isomura, Kouhei Satou, Takashi Uemura, Satoshi Yamamoto, Hiromichi Kawasaki | 2023-03-07 |