Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835851 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Tsuneo Terasawa, Hideo Kaneko, Kazuhiro Nishikawa | 2023-12-05 |
| 11789357 | Method of manufacturing reflective mask blank, and reflective mask blank | Yukio Inazuki, Tsuneo Terasawa | 2023-10-17 |
| 11644742 | Phase shift mask blank, manufacturing method thereof, and phase shift mask | — | 2023-05-09 |
| 11644743 | Halftone phase shift-type photomask blank, method of manufacturing thereof, and halftone phase shift-type photomask | Keisuke SAKURAI | 2023-05-09 |