Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835851 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Tsuneo Terasawa, Takuro Kosaka, Hideo Kaneko, Kazuhiro Nishikawa | 2023-12-05 |
| 11789357 | Method of manufacturing reflective mask blank, and reflective mask blank | Takuro Kosaka, Tsuneo Terasawa | 2023-10-17 |
| 11624712 | Substrate defect inspection method and substrate defect inspection apparatus | Tsuneo Terasawa, Hideo Kaneko | 2023-04-11 |