Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835851 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Tsuneo Terasawa, Takuro Kosaka, Kazuhiro Nishikawa | 2023-12-05 |
| 11774845 | Photomask blank, and manufacturing method thereof | Kouhei Sasamoto | 2023-10-03 |
| 11624712 | Substrate defect inspection method and substrate defect inspection apparatus | Tsuneo Terasawa, Yukio Inazuki | 2023-04-11 |