Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835851 | Substrate with multilayer reflection film for EUV mask blank, manufacturing method thereof, and EUV mask blank | Yukio Inazuki, Tsuneo Terasawa, Takuro Kosaka, Hideo Kaneko | 2023-12-05 |
| 11774598 | Information processing device, information processing method, and computer readable medium | Seigo Fujita | 2023-10-03 |
| 11577490 | Heat insulating material, method for manufacturing same, and electronic equipment and automobile using same | Kazuma Oikawa, Shigeaki Sakatani, Daido Komyoji | 2023-02-14 |