Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644743 | Halftone phase shift-type photomask blank, method of manufacturing thereof, and halftone phase shift-type photomask | Takuro Kosaka | 2023-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644743 | Halftone phase shift-type photomask blank, method of manufacturing thereof, and halftone phase shift-type photomask | Takuro Kosaka | 2023-05-09 |