Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804371 | Substrate treatment apparatus and method of performing treatment process on substrate | Do Yeon Kim, Se-hoon Oh, Won Geun KIM, Ju-Mi Lee, Ho Jong HWANG +3 more | 2023-10-31 |
| 11764084 | Surface treatment apparatus and surface treatment method | Jung Suk GOH, Sun Mi Kim, Ji Su Hong, Kuk Saeng KIM, Cheng Bin CUI | 2023-09-19 |
| 11682577 | Spin head, apparatus and method for treating a substrate including the spin head | Jihwan LEE, Jungbong Choi, Chan Young Heo | 2023-06-20 |