Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804371 | Substrate treatment apparatus and method of performing treatment process on substrate | Do Yeon Kim, Se-hoon Oh, Ju-Mi Lee, Ho Jong HWANG, Pil Kyun HEO +3 more | 2023-10-31 |
| 11772198 | Apparatus including laser heating for etching thin layer | Tae Shin KIM | 2023-10-03 |
| 11715651 | Apparatus for and method of treating substrate | Young Dae CHUNG, Jee Young Lee, Ji Hoon Jeong, Tae Shin KIM, Jung Suk GOH +2 more | 2023-08-01 |