Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11806767 | Substrate processing apparatus and substrate processing method | — | 2023-11-07 |
| 11804371 | Substrate treatment apparatus and method of performing treatment process on substrate | Do Yeon Kim, Se-hoon Oh, Won Geun KIM, Ju-Mi Lee, Pil Kyun HEO +3 more | 2023-10-31 |