Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682577 | Spin head, apparatus and method for treating a substrate including the spin head | Jihwan LEE, Jungbong Choi, Pil Kyun HEO | 2023-06-20 |
| 11621159 | Method for treating substrate | Do Heon Kim, Kihoon Choi, Ki-Moon Kang | 2023-04-04 |