Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682577 | Spin head, apparatus and method for treating a substrate including the spin head | Jungbong Choi, Chan Young Heo, Pil Kyun HEO | 2023-06-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682577 | Spin head, apparatus and method for treating a substrate including the spin head | Jungbong Choi, Chan Young Heo, Pil Kyun HEO | 2023-06-20 |