Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852984 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Ho YU, Minseok Choi | 2023-12-26 |
| 11822260 | Apparatus for removing residue of EUV light source vessel | Jongbin Park, Minseok Choi, Inho Choi | 2023-11-21 |
| 11720027 | Apparatus for generating extreme ultraviolet light and lithography apparatus including the same | Injae Lee, Ohkug Kwon, Sunghyup Kim, Yongchan Kim, Ouiserg Kim +4 more | 2023-08-08 |
| 11711883 | Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same | Minseok Choi, Injae Lee, Inho Choi, Sungyeol Kim, Sunghyup Kim +1 more | 2023-07-25 |
| 11698590 | Collector mirror and apparatus for creating extreme ultraviolet light including the same | Hoseok Song, Sunghyup Kim, Injae Lee | 2023-07-11 |
| 11633041 | Refrigerator | — | 2023-04-25 |
| 11599031 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Ho YU, Minseok Choi | 2023-03-07 |