Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822260 | Apparatus for removing residue of EUV light source vessel | Jongbin Park, Minseok Choi, Jeonggil Kim | 2023-11-21 |
| 11711883 | Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same | Minseok Choi, Injae Lee, Sungyeol Kim, Sunghyup Kim, Jeonggil Kim +1 more | 2023-07-25 |