Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852984 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Jeonggil Kim, Minseok Choi | 2023-12-26 |
| 11599031 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Jeonggil Kim, Minseok Choi | 2023-03-07 |