Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11698590 | Collector mirror and apparatus for creating extreme ultraviolet light including the same | Sunghyup Kim, Injae Lee, Jeonggil Kim | 2023-07-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11698590 | Collector mirror and apparatus for creating extreme ultraviolet light including the same | Sunghyup Kim, Injae Lee, Jeonggil Kim | 2023-07-11 |