Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776840 | Superstrate chuck, method of use, and method of manufacturing an article | Nilabh K. Roy, Seth J. Bamesberger, Ozkan Ozturk, Byung-Jin Choi | 2023-10-03 |
| 11656546 | Exposure apparatus for uniform light intensity and methods of using the same | Nilabh K. Roy, Masaki Saito | 2023-05-23 |
| 11614693 | Method of determining the initial contact point for partial fields and method of shaping a surface | Xiaoming Lu, Logan L. Simpson | 2023-03-28 |
| 11604409 | Template replication | Byung-Jin Choi, Anshuman Cherala | 2023-03-14 |
| 11590687 | Systems and methods for reducing pressure while shaping a film | Niyaz Khusnatdinov, Seth J. Bamesberger | 2023-02-28 |
| 11550216 | Systems and methods for curing a shaped film | Anshuman Cherala, Byung-Jin Choi | 2023-01-10 |