Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776840 | Superstrate chuck, method of use, and method of manufacturing an article | Nilabh K. Roy, Mario Johannes Meissl, Ozkan Ozturk, Byung-Jin Choi | 2023-10-03 |
| 11725272 | Method, system and apparatus for cooling a substrate | Byung-Jin Choi, Alex Ruiz, Nilabh K. Roy | 2023-08-15 |
| 11728203 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Se-Hyuk Im, Byung-Jin Choi | 2023-08-15 |
| 11590687 | Systems and methods for reducing pressure while shaping a film | Niyaz Khusnatdinov, Mario Johannes Meissl | 2023-02-28 |
| 11562924 | Planarization apparatus, planarization process, and method of manufacturing an article | Ozkan Ozturk, Christopher Ellis Jones, Se-Hyuk Im | 2023-01-24 |