Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776833 | Method for improving accuracy of imprint force application in imprint lithography | — | 2023-10-03 |
| 11776840 | Superstrate chuck, method of use, and method of manufacturing an article | Mario Johannes Meissl, Seth J. Bamesberger, Ozkan Ozturk, Byung-Jin Choi | 2023-10-03 |
| 11747731 | Curing a shaped film using multiple images of a spatial light modulator | James W. Irving, Edward Brian Fletcher | 2023-09-05 |
| 11725272 | Method, system and apparatus for cooling a substrate | Byung-Jin Choi, Seth J. Bamesberger, Alex Ruiz | 2023-08-15 |
| 11656546 | Exposure apparatus for uniform light intensity and methods of using the same | Mario Johannes Meissl, Masaki Saito | 2023-05-23 |