Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776840 | Superstrate chuck, method of use, and method of manufacturing an article | Nilabh K. Roy, Mario Johannes Meissl, Seth J. Bamesberger, Byung-Jin Choi | 2023-10-03 |
| 11562924 | Planarization apparatus, planarization process, and method of manufacturing an article | Seth J. Bamesberger, Christopher Ellis Jones, Se-Hyuk Im | 2023-01-24 |