Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728203 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Seth J. Bamesberger, Byung-Jin Choi | 2023-08-15 |
| 11562924 | Planarization apparatus, planarization process, and method of manufacturing an article | Seth J. Bamesberger, Ozkan Ozturk, Christopher Ellis Jones | 2023-01-24 |