Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11614693 | Method of determining the initial contact point for partial fields and method of shaping a surface | Logan L. Simpson, Mario Johannes Meissl | 2023-03-28 |
| 11587795 | Planarization apparatus including superstrate chuck with bendable periphery | — | 2023-02-21 |