Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791166 | Selective etch process using hydrofluoric acid and ozone gases | Qi Zhang, Haichun Yang, Hua Chung, Michael X. Yang | 2023-10-17 |
| 11791181 | Methods for the treatment of workpieces | Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma, Haichun Yang +1 more | 2023-10-17 |