| 11837447 |
Workpiece processing apparatus with plasma and thermal processing systems |
Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Rolf Bremensdorfer +1 more |
2023-12-05 |
| 11812523 |
Thermal processing system with transmission switch plate |
Rolf Bremensdorfer |
2023-11-07 |
| 11791166 |
Selective etch process using hydrofluoric acid and ozone gases |
Qi Zhang, Haichun Yang, Hua Chung, Ting Xie |
2023-10-17 |
| 11791181 |
Methods for the treatment of workpieces |
Ting Xie, Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma +1 more |
2023-10-17 |
| 11764072 |
Method for processing a workpiece using a multi-cycle thermal treatment process |
Shawming Ma |
2023-09-19 |
| 11721539 |
Arc lamp with forming gas for thermal processing systems |
Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more |
2023-08-08 |
| 11699603 |
Thermal processing system with temperature non-uniformity control |
Chen-An Chen |
2023-07-11 |
| 11644817 |
Control system for adaptive control of a thermal processing system |
Markus Lieberer, Joseph Cibere |
2023-05-09 |
| 11610824 |
Transmission-based temperature measurement of a workpiece in a thermal processing system |
Michael Storek, Rolf Bremensdorfer, Markus Lieberer |
2023-03-21 |
| 11586113 |
Methods and apparatus for post exposure bake processing of a workpiece |
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2023-02-21 |