Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837447 | Workpiece processing apparatus with plasma and thermal processing systems | Alex Wansidler, Dieter Hezler, Joseph Cibere, Rolf Bremensdorfer, Pete Lembesis +1 more | 2023-12-05 |
| 11749509 | Temperature control using temperature control element coupled to faraday shield | Yorkman Ma | 2023-09-05 |