Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791166 | Selective etch process using hydrofluoric acid and ozone gases | Qi Zhang, Hua Chung, Ting Xie, Michael X. Yang | 2023-10-17 |
| 11791181 | Methods for the treatment of workpieces | Ting Xie, Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma +1 more | 2023-10-17 |