Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791166 | Selective etch process using hydrofluoric acid and ozone gases | Qi Zhang, Haichun Yang, Ting Xie, Michael X. Yang | 2023-10-17 |
| 11791181 | Methods for the treatment of workpieces | Ting Xie, Haochen Li, Xinliang Lu, Shawming Ma, Haichun Yang +1 more | 2023-10-17 |
| 11649559 | Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate | Xinyu BAO, Chun Yan, Schubert S. Chu | 2023-05-16 |
| 11643721 | Low temperature deposition of iridium containing films | Feng Q. Liu, Schubert S. Chu, Mei Chang, Jeffrey W. Anthis, David Thompson | 2023-05-09 |
| 11626269 | Chamber seasoning to improve etch uniformity by reducing chemistry | Qi Zhang, Xinliang Lu | 2023-04-11 |