Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791181 | Methods for the treatment of workpieces | Ting Xie, Hua Chung, Haochen Li, Shawming Ma, Haichun Yang +1 more | 2023-10-17 |
| 11626269 | Chamber seasoning to improve etch uniformity by reducing chemistry | Qi Zhang, Hua Chung | 2023-04-11 |