Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798785 | Systems for reverse pulsing | Maolin Long, Ying Wu, Qian Fu, Alex Paterson, John Drewery | 2023-10-24 |
| 11742212 | Directional deposition in etch chamber | Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath, Sung Jin Jung +3 more | 2023-08-29 |
| 11646207 | Silicon oxide silicon nitride stack stair step etch | Ce Qin, Qian Fu, Sam Do Lee | 2023-05-09 |