Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837493 | Electrostatic chuck assembly for plasma processing apparatus | Weimin Zeng | 2023-12-05 |
| 11798785 | Systems for reverse pulsing | Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery | 2023-10-24 |
| 11728136 | RF pulsing within pulsing for semiconductor RF plasma processing | Yuhou Wang, Ying Wu, Alex Paterson | 2023-08-15 |
| 11728137 | Direct frequency tuning for matchless plasma source in substrate processing systems | Yuhou Wang, Ying Wu, Alexander Paterson | 2023-08-15 |
| 11716805 | Matchless plasma source for semiconductor wafer fabrication | Yuhou Wang, Ricky Marsh, Alex Paterson | 2023-08-01 |