Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728137 | Direct frequency tuning for matchless plasma source in substrate processing systems | Yuhou Wang, Maolin Long, Ying Wu | 2023-08-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728137 | Direct frequency tuning for matchless plasma source in substrate processing systems | Yuhou Wang, Maolin Long, Ying Wu | 2023-08-15 |