Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798785 | Systems for reverse pulsing | Maolin Long, Zhongkui Tan, Qian Fu, Alex Paterson, John Drewery | 2023-10-24 |
| 11728136 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Yuhou Wang, Alex Paterson | 2023-08-15 |
| 11728137 | Direct frequency tuning for matchless plasma source in substrate processing systems | Yuhou Wang, Maolin Long, Alexander Paterson | 2023-08-15 |
| 11569067 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Alex Paterson | 2023-01-31 |