Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798785 | Systems for reverse pulsing | Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, John Drewery | 2023-10-24 |
| 11728136 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Yuhou Wang, Ying Wu | 2023-08-15 |
| 11716805 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Ricky Marsh | 2023-08-01 |
| 11692732 | Air cooled faraday shield and methods for using the same | Saravanapriyan Sriraman, John Drewery, Jon McChesney | 2023-07-04 |
| 11605546 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Jon McChesney | 2023-03-14 |
| 11569067 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Ying Wu | 2023-01-31 |