Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11704463 | Method of etch model calibration using optical scatterometry | Ye Feng, Marcus Musselman, Andrew D. Bailey, III, Mehmet Derya Tetiker, Yan Zhang +1 more | 2023-07-18 |
| 11692732 | Air cooled faraday shield and methods for using the same | John Drewery, Jon McChesney, Alex Paterson | 2023-07-04 |
| 11624981 | Resist and etch modeling | David M. Fried | 2023-04-11 |