Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742212 | Directional deposition in etch chamber | Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Sung Jin Jung +3 more | 2023-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742212 | Directional deposition in etch chamber | Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Sung Jin Jung +3 more | 2023-08-29 |