Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682541 | Radio frequency power supply system, plasma processor, and frequency-tuning matching | Lei Xu, Leyi Tu | 2023-06-20 |
| 11676803 | Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatus | Rason Zuo | 2023-06-13 |
| 11670515 | Capacitively coupled plasma etching apparatus | Yunwen Huang, Jie Liang, Jinlong Zhao, Lei Wu | 2023-06-06 |
| 11626314 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Rubin Ye, Manus Wong, Jie Liang, Leyi Tu, Ziyang Wu | 2023-04-11 |
| 11545342 | Plasma processor and processing method | Leyi Tu | 2023-01-03 |