Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676803 | Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatus | Tuqiang Ni | 2023-06-13 |
| 11621149 | Corrosion-resistant gas delivery assembly, and plasma processing apparatus | Yilong Su, Miaojuan Chen | 2023-04-04 |