Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682541 | Radio frequency power supply system, plasma processor, and frequency-tuning matching | Tuqiang Ni, Lei Xu | 2023-06-20 |
| 11626314 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Tuqiang Ni, Rubin Ye, Manus Wong, Jie Liang, Ziyang Wu | 2023-04-11 |
| 11545342 | Plasma processor and processing method | Tuqiang Ni | 2023-01-03 |