Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626314 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Tuqiang Ni, Manus Wong, Jie Liang, Leyi Tu, Ziyang Wu | 2023-04-11 |