Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670515 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao, Lei Wu | 2023-06-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670515 | Capacitively coupled plasma etching apparatus | Tuqiang Ni, Jie Liang, Jinlong Zhao, Lei Wu | 2023-06-06 |